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On-line thickness measurement for two-layer systems on polymer electronic devices
Ana Perez Grassi1, Anton J Tremmel, Alexander W Koch
1Institute for Measurement Systems and Sensor Technology, Technische Universität München, Theresienstr. 90/N5, Munich 80333, Germany. a.perez@tum.de.
Sensors (Basel, Switzerland)
|November 21, 2013
Summary
This study introduces a new model for measuring two-layer systems using thin film reflectometry (TFR). The model accurately determines coating thickness in printed electronics, even with process vibrations and irregular interfaces.
Area of Science:
- Materials Science
- Optical Metrology
- Manufacturing Engineering
Background:
- Accurate control of coating thickness is critical for printed electronic device performance.
- Existing measurement methods may not account for process-induced distortions.
Purpose of the Study:
- To develop and validate a thin film reflectometry (TFR) model for measuring two-layer systems.
- To incorporate irregular interfaces and production vibrations into the TFR model.
Main Methods:
- Developed a novel TFR model accounting for interface irregularities and vertical vibrations.
- Applied the model to polymer electronics on various substrates.
- Validated results against profilometer measurements.
Main Results:
- The model accurately measures two-layer system thickness, considering interface distortions and vibrations.
- Incorporating vibration data proved essential for accurate thickness determination.
- High agreement was found between TFR model results and profilometer data.
Conclusions:
- The proposed TFR model offers a reliable, non-contact method for inspecting two-layer systems in industrial settings.
- This approach is suitable for polymer electronics and other materials with known optical properties.
- The model enhances quality control in printed electronics manufacturing.
