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Updated: May 5, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
C A Carlsson1, G Matscheko, P Spanne
1Radiation Physics Department, University of Linköping, the Medical School, S-581 85, Linköping, Sweden.
This study introduces a micro-computed tomography (CT) system achieving 1 μm spatial resolution using synchrotron radiation. This advancement significantly reduces scan times and enhances imaging capabilities for detailed material analysis.
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