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Lattice imaging at an accelerating voltage of 30kV using an in-lens type cold field-emission scanning electron

Mitsuru Konno1, Takeshi Ogashiwa1, Takeshi Sunaoshi1

  • 1Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.

Ultramicroscopy
|December 3, 2013
PubMed

Keywords:
FE-SEMLattice imagingLow-voltage STEM

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