Parallelization of thermochemical nanolithography
Keith M Carroll1, Xi Lu, Suenne Kim
1School of Physics, Georgia Institute of Technology, 837 State Street, Atlanta, Georgia 30332-0430, USA. jennifer.curtis@physics.gatech.edu riedo@gatech.edu.
Nanoscale
|December 17, 2013
Abstract:
One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.
