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Fiber Optic Distributed Sensors for High-resolution Temperature Field Mapping

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A two-dimensional flow sensor with integrated micro thermal sensing elements and a back propagation neural network.

Ruiyi Que¹, Rong Zhu²

¹State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China. qry09@mails.tsinghua.edu.cn.

Sensors (Basel, Switzerland)

|January 4, 2014

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This study presents a novel flow sensor with 360° direction sensitivity using four sensing elements and a data fusion algorithm. It accurately measures airflow speed and direction, proving its effectiveness in wind tunnel experiments.

Area of Science:

Microelectromechanical systems (MEMS)
Fluid dynamics
Sensor technology

Background:

Accurate measurement of fluid flow magnitude and direction is crucial in various applications.
Existing flow sensors often have limitations in directional sensitivity or structural complexity.

Purpose of the Study:

To develop a novel flow sensor with two-dimensional 360° direction sensitivity.
To achieve high accuracy in measuring both airflow speed and direction using a simple structure and advanced data fusion.

Main Methods:

Fabrication of a Ti/Au thin-film probe (2 mm diameter) using micromachining.
Utilizing four sensing elements in constant temperature difference (CTD) mode as heaters and detectors.
Employing a BP neural network for data fusion to deduce flow parameters.

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Thermal Measurement Techniques in Analytical Microfluidic Devices

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Main Results:

The sensor achieved 360° directional sensitivity by measuring flow-induced temperature differences.
Wind tunnel tests demonstrated airflow speed accuracy of 0.72 m/s (3-30 m/s range).
Flow direction angle accuracy reached 1.9° across the full 360° range.

Conclusions:

The novel flow sensor design is validated through simulations and experiments.
The proposed data fusion algorithm effectively determines flow magnitude and direction.
The sensor offers a simple yet effective solution for precise multi-directional flow measurement.