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Parallel multiplex laser feedback interferometry.

Song Zhang1, Yidong Tan1, Shulian Zhang1

  • 1State Key Laboratory of Precision Measurements, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.

The Review of Scientific Instruments
|January 7, 2014
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Summary
This summary is machine-generated.

This study introduces a novel parallel multiplex laser feedback interferometer using spatial multiplexing. This design effectively eliminates signal crosstalk, achieving high-resolution displacement measurements with remarkable accuracy.

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Area of Science:

  • Optics and Photonics
  • Interferometry
  • Metrology

Background:

  • Traditional laser feedback interferometers can suffer from signal crosstalk, limiting measurement accuracy.
  • Spatial multiplexing offers a potential solution to mitigate crosstalk in interferometric systems.

Purpose of the Study:

  • To develop and validate a parallel multiplex laser feedback interferometer that overcomes signal crosstalk.
  • To achieve high-resolution and accurate displacement measurements using spatial multiplexing.

Main Methods:

  • Implementation of a parallel multiplex interferometer utilizing spatial multiplexing.
  • Simultaneous frequency shifting of two parallel laser beams using acousto-optic modulators.
  • Heterodyne demodulation with two detectors for simultaneous phase variation measurement.

Main Results:

  • Experimental validation under typical room conditions.
  • Achieved a displacement measurement resolution of 1.6 nm.
  • Demonstrated an accuracy of 7.8 nm within a 100 μm range.

Conclusions:

  • The developed parallel multiplex laser feedback interferometer effectively eliminates signal crosstalk.
  • The system provides high-resolution and accurate displacement measurements, suitable for various metrology applications.