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An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

T Dargent1, K Haddadi1, T Lasri1

  • 1Institut d'Electronique, de Microélectronique et de Nanotechnologie, CNRS UMR 8520∕University of Lille 1, Avenue Poincaré, CS 60069, 59652 Villeneuve d'Ascq, France.

The Review of Scientific Instruments
|January 7, 2014
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