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Updated: May 4, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Rigorous analysis of highly tunable cylindrical transverse magnetic mode re-entrant cavities
J-M Le Floch1, Y Fan1, M Aubourg2
1School of Physics, University of Western Australia, 35 Stirling Hwy, 6009 Crawley, Western Australia, Australia.
Abstract:
Cylindrical re-entrant cavities are unique three-dimensional structures that resonate with their electric and magnetic fields in separate parts of the cavity. To further understand these devices, we undertake rigorous analysis of the properties of the resonance using "in-house" developed Finite Element Method (FEM) software capable of dealing with small gap structures of extreme aspect ratio. Comparisons between the FEM method and experiments are consistent and we illustrate where predictions using established lumped element models work well and where they are limited. With the aid of the modeling we design a highly tunable cavity that can be tuned from 2 GHz to 22 GHz just by inserting a post into a fixed dimensioned cylindrical cavity. We show this is possible, as the mode structure transforms from a re-entrant mode during the tuning process to a standard cylindrical transverse magnetic mode.
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