Top-orthogonal-to-bottom-electrode (TOBE) CMUT arrays for 3-D ultrasound imaging

Two-dimensional ultrasound arrays hold great promise for 3-D imaging; however, wiring of each channel becomes impractical for large arrays or for small-footprint catheter probes for which the number of wires must be limited. Capacitive micromachined ultrasound transducers offer a promising solution for such 2-D array applications, but channel routing is still non-trivial. A top-orthogonal-to-bottom-electrode (TOBE) 2-D CMUT array architecture is presented along with row-column addressing schemes for low-channel-count 3-D ultrasound imaging. An N × N TOBE array is capable of obtaining 3-D images using only 2N channels. An interfacing scheme is presented in which transmit-receive signals are routed along rows while bias voltages are applied along columns, effectively allowing for single-element transmit/receive control. Simulations demonstrated potentially finer resolution and improved side lobe suppression over a previously published row-column-based imaging method. Laser vibrometer testing was done to measure membrane displacement in air and confirmed that single-element air-coupled actuation in transmit mode could be achieved using our proposed interfacing scheme. Acoustic testing was also performed in both transmit and receive modes to characterize the ability of the proposed interfacing scheme to achieve dominant-element transmission and reception in immersion operation. It was seen that membrane displacement in both modes was indeed largely confined to the active area.