Enhanced sensitivity in polymer slot waveguides by atomic layer deposited bilayer coatings

The refractive index sensitivity of a polymer slot waveguide coated with a bilayer of Al₂O₃/TiO₂ was investigated theoretically and optimized for biosensor applications. The influence of atomic-layer-deposition-coated thin high-refractive-index layers on the slot confinement factor and the homogeneous sensitivity of polymer slot waveguides with different geometries were simulated. The results were compared with those of an optimized noncoated polymer slot waveguide, both operating at visible wavelengths. The simulations reveal that the proposed structure offers a significant improvement in the confinement factor and the sensitivity. These calculations present guidelines for the design and fabrication of relatively sensitive polymer slot waveguide devices for low-cost biochemical sensor applications.