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Updated: May 2, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Analytical and numerical modeling of radio frequency electron cyclotron resonance power absorption within the cold
E G Evstatiev1, V A Svidzinski1, J A Spencer1
1FAR-TECH, Inc., San Diego, California 92121, USA.
Abstract:
We present a one dimensional model of radio frequency (RF) power absorption in electron cyclotron resonance (ECR) ion sources based on a modified cold plasma dielectric description. The absorption is modeled by an imaginary collision frequency (damping coefficient) whose value is related to physical parameters such as magnetic field and its spatial derivative, electron temperature, and RF frequency and power. Properties and scaling laws of ECR power absorption are discussed within this model. Numerical benchmarking against a more accurate kinetic plasma code shows very good agreement.
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