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Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
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Controlling precise magnetic field configuration around electron cyclotron resonance zone for enhancing plasma

Keisuke Yano1, Yosuke Kurisu1, Dai Nozaki1

  • 1Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan.

The Review of Scientific Instruments
|March 6, 2014
PubMed

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