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New tandem type ion source based on electron cyclotron resonance for universal source of synthesized ion beams

Yushi Kato1, Yosuke Kurisu1, Dai Nozaki1

  • 1Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan.

The Review of Scientific Instruments
|March 6, 2014
PubMed

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