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Updated: May 2, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
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Large diameter permanent-magnets-expanded plasma source for spontaneous generation of low-energy ion beam

Kazunori Takahashi1, Tatsuya Suzuki2, Akira Ando1

  • 1Department of Electrical Engineering, Tohoku University, Sendai 980-8579, Japan.

The Review of Scientific Instruments
|March 6, 2014
PubMed

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