Characteristics of acetone cluster ion beam for surface processing and modification.

H Ryuto1, Y Kakumoto1, M Takeuchi1

  • 1Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto 615-8510, Japan.

Summary

Researchers developed a new method for producing acetone cluster ion beams without helium. This technique, utilizing modified equipment, achieved significant cluster sizes and beam currents for advanced research applications.

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