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Solion ion source for high-efficiency, high-throughput solar cell manufacturing.

John Bon-Woong Koo1, Brant Binns1, Timothy Miller1

  • 1Applied Materials, Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, Massachusetts 01930, USA.

The Review of Scientific Instruments
|March 6, 2014
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Summary

We developed the Solion ion source for efficient solar cell doping. An in situ cleaning method extends its lifetime, enabling high-throughput production of over 1100 cells per hour.

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Area of Science:

  • Materials Science
  • Semiconductor Physics
  • Plasma Physics

Background:

  • High-throughput solar cell doping is crucial for renewable energy production.
  • Existing ion sources face lifetime limitations due to increased power demands.
  • Degradation of plasma chambers and extraction electrodes hinders efficiency.

Purpose of the Study:

  • Introduce the Solion ion source for high-throughput solar cell doping.
  • Optimize electron energies to improve production efficiency.
  • Develop an in situ cleaning method to extend source lifetime.

Main Methods:

  • Explored a wide range of electron energies to identify optimal production conditions.
  • Developed and implemented an in situ cleaning technique using existing hardware.
  • Tested the Solion ion source with phosphorous and boron ion beams.

Main Results:

  • Achieved source lifetimes exceeding 200 hours for phosphorous and 100 hours for boron ion beams.
  • Maintained a production rate of 1100 solar cells per hour.
  • Identified specific electron energy conditions that enhance efficiency and minimize degradation.

Conclusions:

  • The Solion ion source, combined with optimized electron energies and in situ cleaning, significantly enhances solar cell doping efficiency and longevity.
  • This advancement supports high-throughput manufacturing of solar cells.
  • The developed cleaning method offers a practical solution for extending the operational life of ion sources.