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Updated: May 2, 2026

Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films
Published on: August 19, 2016
[Determination of film thickness, component and content based on glass surface by using XRF spectrometry]
Yan Mei1, Mi-Xia Ma2, Zuo-Ren Nie3
1College of Materials Science and Engineering, Beijing University of Technology, Beijing, China. meiyan@bjut.edu.cn
Abstract:
Film thickness, component and content based on glass surface were determined by using XRF technic, measure condition and instrument work condition in every layer were set and adjusted for the best measure effect for every element. Background fundamental parameter (BG-FP) method was built up. Measure results with this method were consistent with the actual preparation course and the method could fit to production application.
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