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Parameter extraction from fabricated silicon photonic devices.

Xi Chen, Zheng Li, Moustafa Mohamed

    Applied Optics
    |March 26, 2014
    PubMed
    Summary

    This study extracts effective refractive indices for silicon photonic devices like micro-ring resonators and directional couplers. These indices accurately predict device performance, aiding in fabrication quality control.

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    Area of Science:

    • Photonics and optical engineering.
    • Materials science and semiconductor device characterization.

    Background:

    • Silicon photonics enables integrated optical circuits.
    • Accurate material property extraction is crucial for device performance prediction.

    Purpose of the Study:

    • To extract effective refractive indices for silicon photonic devices.
    • To validate extracted indices by reconstructing experimental transmission spectra.

    Main Methods:

    • Combined analytical and numerical modeling.
    • Fabrication and in-house measurement of micro-ring resonators, racetrack resonators, and directional couplers.
    • Dispersion curve analysis to determine effective index as a function of wavelength.

    Main Results:

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  • Extracted dispersion curves show linearity with wavelength in the S and C bands.
  • Effective indices accurately reconstruct measured transmission spectra, showing close agreement with experiments.
  • The method provides plausible results for silicon photonic devices.

    • Conclusions:

    • The extracted effective indices are reliable for characterizing silicon photonic devices.
    • This approach can inform and constrain fabrication parameters like waveguide dimensions and coupling gaps.
    • The findings support the use of effective indices for predicting device performance in silicon photonics.