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Nanosecond laser pulse induced concentric surface structures on SiO2 layer.

Wei Sun, Hongji Qi, Zhou Fang

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    Summary
    This summary is machine-generated.

    Periodic surface structures on silicon dioxide (SiO2) layers were created using a single nanosecond laser pulse. These structures

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    Area of Science:

    • Materials Science
    • Laser Physics
    • Surface Engineering

    Background:

    • Silicon dioxide (SiO2) is a critical material in microelectronics and optics.
    • Understanding laser-induced surface modifications is essential for material processing and device fabrication.
    • Nanosecond pulsed lasers offer unique capabilities for precise material ablation and structuring.

    Purpose of the Study:

    • To investigate the formation of periodic concentric surface structures on SiO2.
    • To analyze the influence of laser fluence and precursor defects on structure characteristics.
    • To elucidate the underlying mechanism of laser-induced periodic surface structure (LIPSS) formation.

    Main Methods:

    • Irradiation of SiO2 layers with a single 1.06 μm nanosecond laser pulse.
    • Varying laser fluence from 19.6 J/cm² to 61 J/cm².
    • Analysis of structure morphology, fringe period, damage size, and depth.
    • Observation of plasma emission during laser-matter interaction.

    Main Results:

    • Periodic concentric surface structures were successfully induced on SiO2.
    • Fringe periods ranged from 7.0 μm to 26.8 μm, dependent on laser fluence and proximity to defects.
    • Damage site size and depth showed a near-linear increase with laser fluence.
    • Plasma flash was observed, indicating energetic plasma generation.

    Conclusions:

    • The formation of these periodic structures is attributed to interference phenomena.
    • Interference occurs between laser reflections at the air/shock-front and shock-front/film interfaces.
    • This study provides insights into nanosecond laser-matter interactions for SiO2 surface structuring.