Fabrication of stretchable single-walled carbon nanotube logic devices

The fabrication of a stretchable single-walled carbon nanotube (SWCNT) complementary metal oxide semiconductor (CMOS) inverter array and ring oscillators is reported. The SWCNT CMOS inverter exhibits static voltage transfer characteristics with a maximum gain of 8.9 at a supply voltage of 5 V. The fabricated devices show stable electrical performance under the maximum strain of 30% via forming wavy configurations. In addition, the 3-stage ring oscillator demonstrates a stable oscillator frequency of ∼3.5 kHz at a supply voltage of 10 V and the oscillating waveforms are maintained without any distortion under cycles of pre-strain and release. The strains applied to the device upon deformation are also analyzed by using the classical lamination theory, estimating the local strain of less than 0.6% in the SWCNT channel and Pd electrode regions which is small enough to keep the device performance stable under the pre-strain up to 30%. This work demonstrates the potential application of stretchable SWCNT logic circuit devices in future wearable electronics.