Harnessing catalysis to enhance scanning probe nanolithography

Stewart A M Carnally1, Lu Shin Wong

  • 1Manchester Institute of Biotechnology, School of Chemistry, University of Manchester, Manchester M13 9PL, UK. l.s.wong@manchester.ac.uk.

Nanoscale
|April 9, 2014
PubMed
Summary

Catalytic scanning probes enable precise surface nanolithography by directing localized chemical reactions. This direct-write method creates complex nanoscale features, reviewed in this study.