Design and fabrication of birefringent nano-grating structure for circularly polarized light emission

Three different nano-grating structures are designed as phase retarders that can transform linearly polarized light to circularly polarized emission for the wavelengths of 488 nm, 532 nm and 632.8 nm, respectively. Gold based nano-grating structures with various periods are fabricated by utilizing laser interference lithography. The ellipticity of all circularly polarized emission can reach around 90% such that the structure has great potential in the applications of three-dimensional (3D) display. The effects of the slit width and metal thickness modulations are simulated by rigorous coupled wave analysis (RCWA) method. Besides, the field intensity and phase of the transmitted TM and TE waves are also simulated to understand their polarization characteristics.