Structural dynamics of GaN microcrystals in Evolutionary Selection Selective Area Growth probed by X-ray

V Kachkanov1, B Leung2, J Song2

  • 1Diamond Light Source Ltd, Diamond House, Chilton, Didcot, Oxfordshire, OX11 0DE, UK.

Scientific Reports
|April 12, 2014
PubMed
Summary

The Evolutionary Selection Selective Area Growth (ES-SAG) method enables high-quality semiconductor growth. Specific growth tunnel dimensions, like 2.6 μm and 4.5 μm, are crucial for this substrate-insensitive process.

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