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Updated: May 1, 2026

Fabrication of Ti3C2 MXene Microelectrode Arrays for In Vivo Neural Recording
Published on: February 12, 2020
Transparent Conductive Two-Dimensional Titanium Carbide Epitaxial Thin Films.
Joseph Halim1, Maria R Lukatskaya2, Kevin M Cook2
1Department of Materials Science & Engineering, Drexel University , Philadelphia, Pennsylvania 19104, United States ; A.J. Drexel Nanomaterials Institute, Drexel University , Philadelphia, Pennsylvania 19104, United States ; Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University , SE-581 83, Linköping, Sweden.
Researchers fabricated large-area titanium carbide (Ti3C2) films, a type of MXene, using a novel etching method. These conductive 2D films show potential for advanced electronic and photonic devices.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Two-dimensional (2D) materials research has surged since graphene's discovery.
- MXenes, a family of 2D transition metal carbides/carbonitrides, offer a unique combination of conductivity and hydrophilicity.
- Previous MXene forms (powders, flakes, solutions) limited large-scale applications.
Purpose of the Study:
- To develop a method for fabricating large-area (∼1 × 1 cm2) titanium carbide (Ti3C2) films.
- To characterize the structural, optical, and electrical properties of the fabricated Ti3C2 films.
- To explore the potential applications of these 2D MXene films in electronics and photonics.
Main Methods:
- Fabrication of epitaxial Ti3AlC2 films via sputtering.
- Selective etching of aluminum (Al) from Ti3AlC2 films using aqueous hydrofluoric acid (HF) or ammonium bifluoride (NH4HF2).
- Characterization of film thickness, light transmittance, electrical conductivity, and magnetoresistance.
Main Results:
- Successfully fabricated ∼1 × 1 cm2 Ti3C2 films with a thickness of approximately 19 nm.
- NH4HF2-etched films exhibited high optical transparency (∼90% in visible-to-infrared range).
- Films demonstrated metallic conductivity down to ∼100 K, with resistivity increasing and negative magnetoresistance observed below this temperature, indicative of weak localization.
Conclusions:
- The developed etching technique enables the scalable production of high-quality 2D Ti3C2 MXene films.
- The observed properties suggest that these large-area MXene films are promising candidates for electronic, photonic, and sensing applications.
- This work significantly advances the potential for integrating MXenes into practical devices.
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