All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications
You Qian1, Bo Woon Soon, Pushpapraj Singh
1Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576. elelc@nus.edu.sg.
Nanoscale
|April 18, 2014
Abstract:
An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 °C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.
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