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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Ultra-high performance, high-temperature superconducting wires via cost-effective, scalable, co-evaporation process
Ho-Sup Kim1, Sang-Soo Oh1, Hong-Soo Ha1
1Korea Electrotechnology Research Institute, Changwon, Gyeongnam 641-120, Korea.
Abstract:
Long-length, high-temperature superconducting (HTS) wires capable of carrying high critical current, Ic, are required for a wide range of applications. Here, we report extremely high performance HTS wires based on 5 μm thick SmBa2Cu3O7--δ (SmBCO) single layer films on textured metallic templates. SmBCO layer wires over 20 meters long were deposited by a cost-effective, scalable co-evaporation process using a batch-type drum in a dual chamber. All deposition parameters influencing the composition, phase, and texture of the films were optimized via a unique combinatorial method that is broadly applicable for co-evaporation of other promising complex materials containing several cations. Thick SmBCO layers deposited under optimized conditions exhibit excellent cube-on-cube epitaxy. Such excellent structural epitaxy over the entire thickness results in exceptionally high Ic performance, with average Ic over 1,000 A/cm-width for the entire 22 meter long wire and maximum Ic over 1,500 A/cm-width for a short 12 cm long tape. The Ic values reported in this work are the highest values ever reported from any lengths of cuprate-based HTS wire or conductor.
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