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Miniaturized high-precision piezo driven two axes stepper goniometer.

H Zhong1, A Schwarz1, R Wiesendanger1

  • 1Institute of Applied Physics, University of Hamburg, Jungiusstrasse 11, D-20355 Hamburg, Germany.

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Summary

This study presents a miniaturized inertial stepper goniometer utilizing piezo actuators for precise angular measurements. The device achieves microdegree precision, enabling accurate positioning for applications like glass fiber manipulation.

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Area of Science:

  • Precision Engineering
  • Instrumentation
  • Nanotechnology

Background:

  • Accurate angular measurement is crucial for various scientific and industrial applications.
  • Existing goniometers often face limitations in size, precision, or complexity.
  • Miniaturization of high-precision angular positioning systems is an ongoing research area.

Purpose of the Study:

  • To develop and characterize a miniaturized inertial stepper goniometer with two orthogonal axes.
  • To evaluate the sensitivity, step size, and crosstalk of the developed goniometer.
  • To demonstrate the goniometer's utility in precise positioning tasks, such as glass fiber alignment.

Main Methods:

  • A tetrahedral configuration of four shear piezo-based actuators was employed.
  • Actuators were arranged tangent to a polished sapphire spherical rotor.
  • Angular measurements were performed to determine sensitivity, step size, and inter-axis crosstalk.

Main Results:

  • The goniometer achieved a measured sensitivity of approximately 11.5 microdegrees per Volt.
  • The smallest achievable angular step size was approximately 0.6 millidegrees with a 200 V peak-to-peak voltage.
  • Crosstalk between the orthogonal axes was measured to be below 10%.

Conclusions:

  • A functional miniaturized inertial stepper goniometer was successfully realized.
  • The device demonstrates high precision and low crosstalk, suitable for demanding applications.
  • The goniometer's design concept offers potential for diverse applications requiring accurate angular control.