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Related Experiment Video

Updated: Apr 30, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
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The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

Published on: August 12, 2013

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Note: error elimination for ellipsometry by laser feedback instrument.

Wenxue Chen1, Shulian Zhang2, Xingwu Long1

  • 1Department of Opto-electronic Engineering, College of Opto-electronic Science and Engineering, National University of Defense Technology, Changsha 410073, China.

The Review of Scientific Instruments
|May 3, 2014
PubMed
Summary
This summary is machine-generated.

This study introduces a laser-feedback assembly to enhance the accuracy of optical phase retardation measurements, overcoming limitations of traditional ellipsometry for improved wave plate manufacturing.

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Area of Science:

  • Optics and Photonics
  • Metrology

Background:

  • Ellipsometry is a widely used technique for measuring optical phase retardation.
  • While known for high resolution, ellipsometry suffers from uncertain accuracy due to systematic errors.

Purpose of the Study:

  • To analyze systematic errors in ellipsometry for phase retardation measurements.
  • To develop a more accurate method for measuring phase retardation.

Main Methods:

  • Analysis of systematic errors inherent in ellipsometry.
  • Development of a novel laser-feedback assembly for phase retardation measurement.
  • Comparison of results between the new assembly and traditional ellipsometry.

Main Results:

  • Quantification of systematic errors in ellipsometry for phase retardation.
  • The laser-feedback assembly achieved higher resolution and accuracy.
  • Ellipsometry measurement accuracy was improved to approximately 0.2° after error correction.

Conclusions:

  • The developed laser-feedback assembly effectively eliminates systematic errors in ellipsometry.
  • High-precision ellipsometry, improved by this method, is crucial for advanced wave plate manufacturing.