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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Infrared Technology

    Background:

    • Microbolometer focal plane arrays require efficient infrared absorbers.
    • Traditional microbolometers often use silicon nitride for structural support.
    • Narrowband absorption is crucial for specific infrared applications.

    Purpose of the Study:

    • To characterize the spectral response of a novel narrowband Salisbury screen absorber.
    • To investigate the use of a germanium dielectric support structure in microbolometers.
    • To optimize the design for wavelength-selective infrared absorption.

    Main Methods:

    • Fabrication of a microbolometer using a germanium dielectric support layer.
    • Construction of a Salisbury screen absorber with chromium, germanium dielectric, and an air gap.
    • Experimental characterization of the spectral response in the long-wavelength infrared spectrum.

    Main Results:

    • Demonstrated a microfabricated germanium dielectric support structure replacing silicon nitride.
    • Achieved narrowband absorption using a chromium resistive sheet over a germanium dielectric/air-gap/interference structure.
    • Confirmed design rules: air gap thickness at half wavelength, germanium optical thickness at quarter dielectric wavelength.

    Conclusions:

    • The germanium dielectric supported Salisbury screen is suitable for microbolometer focal plane arrays.
    • The demonstrated structure enables wavelength-selective narrowband absorption in the long-wavelength infrared.
    • This advancement offers potential for improved microbolometer performance and specific infrared sensing applications.