You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Apr 30, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A new Diffractive Optics Calibrator (DOC) precisely measures etching variations in computer-generated holograms (CGHs). This quality control device ensures 1 nm accuracy for fabricating advanced optical surfaces.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: