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Updated: Apr 30, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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Preliminary investigation of an SOI-based arrayed waveguide grating demodulation integration microsystem.

Hongqiang Li¹, Wenqian Zhou¹, Yu Liu¹

¹School of Electronics and Information Engineering, Tianjin Polytechnic University, Tianjin 300387, China.

Scientific Reports

|May 7, 2014

Summary

This study presents an integrated microsystem for arrayed waveguide grating (AWG) demodulation, achieving 0.001 nm wavelength measurement precision. The system integrates an on-chip LED, silicon coupler, fiber Bragg grating array, and AWG for advanced optical sensing applications.

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Published on: April 26, 2014

Area of Science:

Photonics and Optical Engineering
Integrated Optics
Nanotechnology

Background:

Optical sensing systems require high precision and integration.
Arrayed waveguide gratings (AWGs) are key components for wavelength demultiplexing.
Miniaturization of optical sensing systems is crucial for advanced applications.

Purpose of the Study:

To investigate an arrayed waveguide grating (AWG) demodulation integration microsystem.
To develop a compact and efficient optical sensing platform.
To evaluate the performance of integrated photonic components.

Main Methods:

Fabrication of a silicon-on-insulator (SOI) based microsystem using electron beam exposure and RIE plasma technology.
Integration of a C-band on-chip LED, 2x2 silicon nanowire coupler, fiber Bragg grating (FBG) array, 1x8 AWG, and photodetector array.
Experimental characterization of individual components and the complete system.

Main Results:

Achieved low excess loss (0.5423 dB) in the MMI coupler.
Demonstrated a 1x8 AWG with -3.18 dB central channel loss and -23.1 dB crosstalk.
Attained a wavelength measurement precision of 0.001 nm.
FBG wavelength sensitivity ranged from 0.04 to 0.06 nm/dB.

Conclusions:

The integrated AWG demodulation microsystem shows promising performance for optical sensing.
The developed system demonstrates high wavelength measurement precision and component efficiency.
This work contributes to the advancement of integrated photonic sensing technologies.