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Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping
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Oxide impurities in silicon oxide intermetal dielectrics and their potential to elevate via-resistances

Wentao Qin1, Donavan Alldredge2, Douglas Heleotes2

  • 11Physical Analysis Lab,CHD-Fab,Freescale Semiconductor Inc.,Chandler,AZ 85224,USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 14, 2014
PubMed

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