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Nano-dot markers for electron tomography formed by electron beam-induced deposition: nanoparticle agglomerates

Misa Hayashida1, Marek Malac2, Michael Bergen3

  • 1National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Higashi, Tsukuba, Ibaraki 305-8565, Japan.

Ultramicroscopy
|May 20, 2014
PubMed

Keywords:
Electron beam induced depositionElectron tomographyFIB sample preparationFiducial markerNano-dot markerNanoparticle agglomerate

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