Viscoelastic leveling of annealed thin polystyrene films

Etienne Rognin1, Stefan Landis, Laurent Davoust

  • 1CEA-LETI-Minatec Campus , 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.

Summary

Nanoscale viscoelastic flow in polystyrene films shows that short surface waves behave elastically, while long waves decay viscously. This behavior is crucial for understanding thin film reflow and pattern evolution.