Measurements of frequency fluctuations in aluminum nitride contour-mode resonators

As part of the current drive to engineer miniaturized monolithic high-performance microelectromechanical-enabled oscillators, there is a need for further study of frequency fluctuations in microelectromechanical resonators. To this end, we present the measurement of frequency fluctuations for 128 aluminum nitride contour-mode resonators. The measurements show that fluctuations are sufficiently large to play an important role in oscillator performance. These results were obtained for the first time from vector network analyzer measurements and are accompanied by an analysis of the experimental setup.