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Updated: Apr 28, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
This study introduces a novel 360-degree profilometer setup for high-resolution 3D digitization. It overcomes limitations of previous systems by employing base-band phase-stepping algorithms and avoiding self-occluding shadows for accurate solid surface measurement.
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