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Updated: Apr 28, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Polarization rotator-splitters and controllers in a Si3N4-on-SOI integrated photonics platform
We developed new silicon nitride (Si(3)N(4)) polarization management devices on a silicon-on-insulator (SOI) platform. These devices, including a broadband rotator-splitter, show excellent performance for integrated photonics applications.
Area of Science:
- Integrated photonics
- Materials science
- Optical engineering
Background:
- Silicon nitride (Si(3)N(4)) on silicon-on-insulator (SOI) platforms offer unique properties for integrated photonics.
- Effective polarization management is crucial for advanced photonic integrated circuits.
- Existing polarization control methods often face limitations in bandwidth and performance.
Purpose of the Study:
- To demonstrate novel polarization management devices utilizing a custom Si(3)N(4) on SOI platform.
- To develop a broadband polarization rotator-splitter based on mode conversion.
- To engineer a functional polarization controller using integrated optical components.
Main Methods:
- Fabrication of Si(3)N(4) waveguides on a SOI platform.
- Design and implementation of a TM0-TE1 mode converter for polarization rotation.
- Integration of rotator-splitters, MMI couplers, and thin-film heaters for polarization control.
Main Results:
- Demonstrated a broadband polarization rotator-splitter with performance metrics: polarization crosstalk < -19 dB, insertion loss < 1.5 dB, and polarization dependent loss < 1.0 dB over an 80 nm bandwidth.
- Successfully fabricated and tested a polarization controller integrated with the rotator-splitter.
- Validated the effectiveness of the composite Si(3)N(4)-silicon waveguide design for polarization manipulation.
Conclusions:
- The developed Si(3)N(4) on SOI platform enables high-performance polarization management devices.
- The novel rotator-splitter design offers broadband operation with low loss and crosstalk.
- These devices are promising for advanced applications in optical communication and sensing.
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