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Radius measurement by laser confocal technology.

Jiamiao Yang, Lirong Qiu, Weiqian Zhao

    Applied Optics
    |June 13, 2014
    PubMed
    Summary
    This summary is machine-generated.

    A novel laser confocal radius measurement (LCRM) method precisely determines the radius of curvature (ROC) using peak points and conic fitting. This technique achieves high accuracy with less than 10 ppm uncertainty for spheres.

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    Area of Science:

    • Optics and Metrology
    • Surface Metrology
    • Precision Engineering

    Background:

    • Accurate measurement of the radius of curvature (ROC) is critical in optical manufacturing and scientific research.
    • Existing methods may be susceptible to environmental disturbances and system noise, impacting measurement precision.

    Purpose of the Study:

    • To propose and validate a high-accuracy laser confocal radius measurement (LCRM) method for determining the radius of curvature.
    • To enhance measurement precision by mitigating environmental and system noise effects.

    Main Methods:

    • Utilizing peak points of confocal response curves to precisely identify cat eye and confocal positions.
    • Implementing conic fitting to significantly improve measurement accuracy and reduce noise influence.
    • Measuring the distance between identified positions to calculate the radius of curvature.

    Main Results:

    • The LCRM method demonstrated high accuracy for both convex and concave spheres.
    • Experimental results showed a relative expanded uncertainty of less than 10 parts per million (ppm).

    Conclusions:

    • The proposed laser confocal radius measurement (LCRM) method is a feasible and accurate technique for radius of curvature determination.
    • LCRM offers a concise structure and high precision, suitable for demanding metrology applications.