Laser-generated broadband antireflection structures for freeform silicon lenses at terahertz frequencies

We present a flexible technology to generate broadband antireflection (AR) structures for the terahertz (THz) frequency range on planar and curved surfaces of silicon optics. Ultrashort laser pulses are used to ablate the surface to form a pattern of conical pillars with a period of 30 μm. These subwavelength structures act as an effective medium with gradual transition of the refractive index from air to silicon, which reduces the Fresnel reflection losses. The characterization with the THz time-domain spectroscopy system shows an AR effect for a frequency range of 0.1-1.5 THz with a maximum enhancement of the spectral amplitude by ca. 32% at 0.4 THz for planar surfaces. In addition, we demonstrate laser-generated AR structures on convex silicon lenses of both photoconductive emitter and detector devices. Here, the THz pulse amplitude can be increased by about 28%, and single frequencies even show an improvement of the spectral amplitude up to 58%.