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Related Experiment Video

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Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence.

John M Gregoire1, Darren Dale2, Alexander Kazimirov2

  • 1Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853.

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
|June 17, 2014
PubMed
Summary
This summary is machine-generated.

We precisely measured yttria-zirconia thin films using X-ray Fluorescence (XRF). Our automated analysis confirmed high-throughput composition reproducibility and measurement accuracy, achieving better than 1% precision.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Thin Film Deposition

Background:

  • Yttria-zirconia thin films are crucial for various applications.
  • Accurate characterization of film composition is essential for performance.
  • High-throughput experimentation demands efficient analytical methods.

Purpose of the Study:

  • To characterize sputtered yttria-zirconia composition spread thin films.
  • To develop and apply an automated analysis for X-ray Fluorescence (XRF) data.
  • To assess the precision of composition reproducibility and measurements.

Main Methods:

  • Sputtered deposition of yttria-zirconia composition spread thin films.
  • X-ray Fluorescence (XRF) analysis.
  • Automated data analysis of high-throughput experimental data.

Main Results:

  • Successful characterization of yttria-zirconia thin films.
  • Demonstration of an automated XRF data analysis pipeline.
  • Composition reproducibility and measurement precision better than 1 atomic percent.

Conclusions:

  • Automated XRF analysis is effective for high-throughput characterization.
  • Achieved high precision in composition measurements for yttria-zirconia films.
  • The methods enable reliable and reproducible thin film analysis.