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Updated: Jul 31, 2026

Quantifying X-Ray Fluorescence Data Using MAPS
Published on: February 17, 2018
Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence
John M Gregoire1, Darren Dale2, Alexander Kazimirov2
1Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853.
Abstract:
We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.
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