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Reversed scan direction reduces electron beam damage in EBSD maps.

S Kidder1, D Prior

  • 1Department of Earth and Atmospheric Science, City College of New York, New York, NY, U.S.A.

Journal of Microscopy
|June 20, 2014
PubMed
Summary
This summary is machine-generated.

Scanning electron beam in the opposite direction significantly reduces electron beam damage in electron backscatter diffraction (EBSD) mapping of quartz. This improved EBSD mapping technique enhances data quality, especially at smaller step sizes.

Keywords:
Beam damageEBSDquartz

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Area of Science:

  • Materials Science
  • Geology
  • Crystallography

Background:

  • Electron beam damage can degrade the quality of high-resolution electron backscatter diffraction (EBSD) maps.
  • Standard EBSD acquisition software dictates a scanning direction that can exacerbate beam damage in materials like quartz.

Purpose of the Study:

  • To investigate an alternative scanning direction to mitigate electron beam damage during EBSD mapping of quartz.
  • To improve the quality and resolution of EBSD maps by optimizing the scanning strategy.

Main Methods:

  • EBSD mapping of undeformed and experimentally deformed quartz samples.
  • Comparison of map quality using conventional versus reversed scanning directions.
  • Analysis of electron beam damage effects at various step sizes (≤ ∼0.4 μm).

Main Results:

  • Scanning in the 'downward' direction (opposite to conventional software) significantly reduces electron beam damage.
  • Higher quality electron backscatter patterns were consistently produced with downward scanning.
  • The improvement in map quality increased as step size decreased, with a factor of ~2 reduction in the lower limit of step size for deformed quartz.

Conclusions:

  • Reversing the scanning direction in EBSD is a simple yet effective method to minimize electron beam damage in quartz.
  • This optimized scanning strategy enhances the reliability and resolution of EBSD analyses, particularly for fine-scale features.
  • The findings have implications for improving EBSD data acquisition in various geological and materials science applications.