In situ multiproperty measurements of individual nanomaterials in SEM and correlation with their atomic structures

The relationship between property and structure is one of the most important fundamental questions in the field of nanomaterials and nanodevices. Understanding the multiproperties of a given nano-object also aids in the development of novel nanomaterials and nanodevices. In this paper, we develop for the first time a comprehensive platform for in situ multiproperty measurements of individual nanomaterials using a scanning electron microscope (SEM). Mechanical, electrical, electromechanical, optical, and photoelectronic properties of individual nanomaterials, with lengths that range from less than 200 nm to 20 μm, can be measured in situ with an SEM on the platform under precisely controlled single-axial strain and environment. An individual single-walled carbon nanotube (SWCNT) was measured on the platform. Three-terminal electronic measurements in a field effect transistor structure showed that the SWCNT was semiconducting and agreed with the structure characterization by transmission electron microscopy after the in situ measurements. Importantly, we observed a bandgap increase of this SWCNT with increasing axial strain, and for the first time, the experimental results quantitatively agree with theoretical predictions calculated using the chirality of the SWCNT. The vibration performance of the SWCNT, a double-walled CNT, and a triple-walled CNT were also studied as a function of axial strain, and were proved to be in good agreement with classical beam theory, although the CNTs only have one, two, or three atomic layers, respectively. Our platform has wide applications in correlating multiproperties of the same individual nanostructures with their atomic structures.