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Updated: Aug 26, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Hard X-ray nanotomography beamline 7C XNI at PLS-II
Jun Lim1, Hyounggyu Kim2, So Yeong Park3
1Beamline Division, Pohang Light Source, Hyoja, Pohang, Kyung-buk 790784, Republic of Korea.
Abstract:
The synchrotron-based hard X-ray nanotomography beamline, named 7C X-ray Nano Imaging (XNI), was recently established at Pohang Light Source II. This beamline was constructed primarily for full-field imaging of the inner structures of biological and material samples. The beamline normally provides 46 nm resolution for still images and 100 nm resolution for tomographic images, with a 40 µm field of view. Additionally, for large-scale application, it is capable of a 110 µm field of view with an intermediate resolution.

