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Related Experiment Video

Updated: Apr 27, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Surface measurements by white light spatial-phase-shift imaging interferometry.

Yoel Arieli, Shlomi Epshtein, Igor Yakubov

|July 1, 2014

Summary

This summary is machine-generated.

A new White Light Spatial-Phase-Shift (WLSPS) method enables object surface measurements from real images, not just direct object analysis. This common-path interferometry technique offers inherent vibration cancelation without a reference beam.

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Area of Science:

Optics
Metrology
Surface Science

Background:

Standard White Light Interferometry (WLI) requires a reference mirror for surface measurements.
Direct object analysis limits the application of interferometric techniques.
Vibration sensitivity is a common challenge in interferometric measurements.

Purpose of the Study:

Introduce a novel common-path imaging interferometry method: White Light Spatial-Phase-Shift (WLSPS).
Demonstrate WLSPS's capability for object surface measurements using real object images.
Highlight the advantages of WLSPS over traditional WLI.

Main Methods:

Interferometry is achieved through light wavefront manipulation reflected from the object's surface.
The method utilizes common-path imaging, eliminating the need for a separate reference mirror.
Surface measurements are performed on real images generated by an optical system.

Main Results:

WLSPS allows surface measurements from any real object image, not requiring direct object access.
The technique integrates seamlessly with optical systems producing real images.
Inherent vibration cancelation is achieved due to the absence of a reference beam.

Conclusions:

WLSPS offers a versatile and robust approach to object surface metrology.
The method enhances applicability by enabling measurements from images rather than direct object interaction.
WLSPS provides a vibration-resistant solution for surface measurement applications.