CMOS-compatible hybrid plasmonic modulator based on vanadium dioxide insulator-metal phase transition

Area of Science:

• Photonics
• Materials Science
• Electrical Engineering

Background:

• Silicon photonics is crucial for optical communication.
• Vanadium dioxide (VO₂) exhibits a unique insulator-metal phase transition.
• Integrating novel materials into silicon photonics enhances device performance.

Purpose of the Study:

• To develop a CMOS-compatible hybrid plasmonic modulator.
• To leverage the phase transition of VO₂ for optical modulation.
• To extend the application of VO₂ in silicon photonics.

Main Methods:

• Designed a hybrid plasmonic waveguide using a directional coupler (Si-SiO₂-VO₂-SiO₂-Si).
• Utilized the insulator-metal phase transition of VO₂ triggered by electrical voltage.
• Integrated the hybrid waveguide into a silicon photonics platform.

Main Results:

• Achieved electrical modulation of optical power by switching VO₂ phase.
• Demonstrated a VO₂-based modulator with a driving voltage of 2 V.
• Obtained an on/off extinction ratio exceeding 3.0 dB across the C-band.

Conclusions:

• The proposed hybrid plasmonic modulator is CMOS-compatible.
• VO₂ phase transition is an effective mechanism for optical modulation in silicon photonics.
• This technology shows promise for advanced optical communication devices.