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Development of a portable deflectometry system for high spatial resolution surface measurements.

Alejandro V Maldonado, Peng Su, James H Burge

    Applied Optics
    |July 1, 2014
    PubMed
    Summary

    The new Slope-Measuring Portable Optical Test System (SPOTS) provides high-resolution optical surface metrology. This portable deflectometry device achieves 1 nm RMS surface accuracy and 300 nrad RMS slope precision for mid to high spatial frequencies.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Science

    Background:

    • Accurate optical surface metrology is crucial for high-performance optical systems.
    • Existing methods may struggle with mid to high spatial frequencies or portability.

    Purpose of the Study:

    • To introduce and characterize the Slope-Measuring Portable Optical Test System (SPOTS).
    • To demonstrate SPOTS' capability for high-resolution optical surface metrology.

    Main Methods:

    • Development of a portable deflectometry device (SPOTS).
    • Utilizing minimal filtering and noise for precise measurements.
    • Experimental validation of the SPOTS system.

    Main Results:

    • Achieved 1 nm RMS surface accuracy for mid to high spatial frequencies (20-1000 cyc/m).
    • Demonstrated 300 nrad RMS slope precision.
    • SPOTS offers a turnkey solution for diverse optical surfaces.

    Conclusions:

    • SPOTS is a novel, portable, high-resolution metrology system.
    • The system effectively measures optical surface errors with high accuracy and precision.
    • SPOTS is suitable for large optics and various applications.