Microstructure of spinel islands on the sapphire surface grown by ion implantation and annealing

Fe ions were implanted into α-Al2O3 single crystals (sapphire) at energy of 50 keV and annealed in an oxidizing environment. Transmission electron microscopy (TEM) investigation indicated that Fe ions in the near surface region precipitated as α-Fe2O3 islands and spinel islands on the specimen surface, at the same time, Fe ions in the region away from the surface precipitated as α-Fe particles in the interior region of specimen. Two orientation relationships (ORs) between the spinel islands and sapphire substrate were discovered as follows: (111)spinel∥(0001)sapphire, [1 1 2¯]spinel∥[1 1 2¯ 0]sapphire and (1 1 2¯)spinel∥(0 0 0 1)sapphire, [1 1 1]spinel∥[1 1 2¯ 0]sapphire. The first OR was frequently observed in the spinel/sapphire system, however, the second OR has never been reported before. The interfaces between the spinel islands and sapphire substrate are a type-3 incoherent interface (i.e. low-index OR in at least one direction with an ill-matched low-index habit planes). The formation of spinel islands on the specimen surface can be attributed to the oxidizing atmosphere and the low accelerating voltage for ion implantation.