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Updated: Apr 27, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Advanced double-biprism holography with atomic resolution.

Florian Genz¹, Tore Niermann¹, Bart Buijsse²

¹Technische Universität Berlin, Institut für Optik und Atomare Physik, Straße des 17. Juni, 10623 Berlin, Germany.

Ultramicroscopy

|July 6, 2014

Summary

This summary is machine-generated.

A dual biprism setup in transmission electron microscopy enhances hologram quality for atomic resolution imaging. This improved stability reduces artifacts and fringe contrast damping, validated by GaN electron holograms.

Keywords:

Double biprism Electron holography HRTEM Optimum biprism position

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Area of Science:

Physics
Materials Science
Microscopy

Background:

Transmission electron microscopy (TEM) is crucial for atomic-scale material analysis.
Electron holography offers advanced imaging capabilities but is sensitive to instrumental stability.
Optimizing biprism placement is key to improving hologram quality and reducing artifacts.

Purpose of the Study:

To implement and evaluate a dual biprism setup for enhanced atomic resolution electron holography.
To investigate the practical improvements in hologram quality and stability.
To assess the limitations and possibilities of the double biprism configuration.

Main Methods:

Implementation of Lichte's optimum biprism position in a state-of-the-art TEM.
Addition of a second biprism as proposed by Harada et al.
Geometric optics calculations to determine exploitable shadow width for artifact reduction.
Estimation of biprism vibration under the dual biprism setup.

Main Results:

Achieved atomic resolution holograms with 30nm width and 30pm fringe spacing.
Demonstrated significant reduction in biprism-induced artifacts through optimized shadow width.
Identified the most stable imaging conditions with minimal fringe contrast damping.
Validated experimental results against simulations using GaN electron holograms.

Conclusions:

The dual biprism setup significantly improves hologram quality and stability in TEM.
This configuration effectively minimizes artifacts and enhances fringe contrast.
The findings provide a pathway for more reliable atomic-scale imaging and analysis.