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Exploring the depth range for three-dimensional laser machining with aberration correction.

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    Ultrafast laser machining depth is extended using liquid crystal spatial light modulator (SLM) aberration correction. This advanced technique enables high-fidelity, parallel fabrication deeper into materials like fused silica.

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    Area of Science:

    • Materials Science
    • Optical Engineering
    • Laser Physics

    Background:

    • Spherical aberration limits precision in ultrafast laser machining when focusing into materials.
    • Accurate fabrication depth is crucial for many micro- and nanofabrication applications.

    Purpose of the Study:

    • To investigate extending the fabrication depth range in ultrafast laser machining.
    • To demonstrate aberration correction using a liquid crystal spatial light modulator (SLM).
    • To evaluate single-point and parallel multi-point fabrication capabilities.

    Main Methods:

    • Utilized a liquid crystal spatial light modulator (SLM) for aberration correction.
    • Performed ultrafast laser machining experiments in fused silica.
    • Employed numerical apertures (NA) of 0.5 and 0.75.
    • Developed a theoretical model for predicting SLM correction effectiveness.

    Main Results:

    • Achieved high-fidelity fabrication at a depth of 2.4 mm in fused silica using NA = 0.5 with parallel processing.
    • Demonstrated single-point fabrication to 1 mm depth with NA = 0.75, maintaining repeatability.
    • Showcased deeper fabrication with reduced NA at higher numerical apertures.

    Conclusions:

    • SLM-based aberration correction significantly extends the workable depth for ultrafast laser machining.
    • Parallel processing is feasible at moderate NA, enhancing fabrication efficiency.
    • The developed theoretical model accurately predicts the performance of SLM correction.