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Measuring nanoparticle size using phase-stepping interferometry: quantifying measurement sensitivity to surface

Douglas J Little, Deb M Kane

    Applied Optics
    |August 5, 2014
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    Summary
    This summary is machine-generated.

    Surface roughness minimally impacts nanoparticle size measurements using phase-stepping interferometry. This analysis confirms the technique

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    Area of Science:

    • Nanotechnology
    • Optical Metrology
    • Surface Science

    Background:

    • Phase-stepping interferometry (PSI) is a developing technique for nanoparticle sizing.
    • Understanding measurement precision limitations is crucial for PSI applications.
    • Surface roughness of substrates can potentially affect optical measurements.

    Purpose of the Study:

    • To analytically quantify the sensitivity of PSI nanoparticle sizing to surface roughness.
    • To determine if surface roughness limits measurement precision in PSI nanoparticle sizing.
    • To assess the impact of substrate smoothness on nanoparticle size determination.

    Main Methods:

    • Developed an analytical procedure to calculate phase measurement standard deviation.
    • Correlated phase deviation with the surface roughness power spectrum.
    • Applied the analysis to nanospheres, nanowires, and isolated flat surfaces.

    Main Results:

    • Calculated sensitivity levels indicate surface roughness is not the primary limitation.
    • The impact of surface roughness on measurement precision was found to be minimal.
    • Analysis highlights the importance of a smooth underlying surface for accurate measurements.

    Conclusions:

    • Phase-stepping interferometry for nanoparticle sizing is robust against typical surface roughness.
    • Substrate smoothness is important but unlikely to be the limiting factor in PSI precision.
    • Further research should focus on other potential sources of measurement error.